T/QGCML 4791-2024 Active Group standards

T/QGCML 4791-2024 Technical Requirements for Semiconductor Film Deposition

T/QGCML 4791-2024

Publish Date: 2024-10-17 Implement Date: 2024-11-01 For services related to genuine standard inquiry, procurement, translation, and other related services in China, please Contact Us

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Basic Information

Standard Code: T/QGCML 4791-2024

Standard Type: Group standards

Standard Status: Active

is_force_gb: no

CCS Name: -

ICS Name: Surface treatment

Publish Date: 2024-10-17

Implement Date: 2024-11-01

Scope

Main technical content: This document specifies the terms and definitions, basic requirements, online monitoring, quality control, and inspection methods for semiconductor film deposition technology. This document is applicable to the design and inspection of semiconductor film deposition technology requirements.

Development Information

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