T/CASME 1520-2024 Active Group standards

T/CASME 1520-2024 Semiconductor manufacturing vacuum chamber component surface protective coating

Publish Date: 2024-06-04 Implement Date: 2024-06-20 For services related to genuine standard inquiry, procurement, translation, and other related services in China, please Contact Us

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Basic Information

Standard Code: T/CASME 1520-2024

Standard Type: Group standards

Standard Status: Active

is_force_gb: no

CCS Name: Integrated

ICS Name: Surface treatment

Publish Date: 2024-06-04

Implement Date: 2024-06-20

Scope

Scope: This document is applicable to the surface protection coatings of vacuum chamber components in semiconductor manufacturing; Main technical content: This document specifies the abbreviations, materials, spraying process, technical requirements, test methods, coating inspection, and spraying records for the surface protection coatings of vacuum chamber components in semiconductor manufacturing.

Development Information

Related Standards

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