T/GVS 014-2024 Active Group standards

T/GVS 014-2024 Low-temperature pump evaluation specification for semiconductor equipment

Publish Date: 2024-08-02 Implement Date: 2024-08-02 For services related to genuine standard inquiry, procurement, translation, and other related services in China, please Contact Us

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Basic Information

Standard Code: T/GVS 014-2024

Standard Type: Group standards

Standard Status: Active

is_force_gb: no

CCS Name: Mechanical

ICS Name: Vacuum technology

Publish Date: 2024-08-02

Implement Date: 2024-08-02

Pages: 17 pages

Scope

Scope: This document specifies the classification, basic requirements, evaluation requirements, evaluation methods, and evaluation results for the evaluation of low-temperature pumps used in semiconductor equipment. This document is applicable to the evaluation of low-temperature pumps used in semiconductor equipment. Main technical content: It specifies the classification, basic requirements, evaluation requirements, evaluation methods, and evaluation results for the evaluation of low-temperature pumps used in semiconductor equipment.