T/QGCML 3233-2024 Active Group standards

T/QGCML 3233-2024 Technical Requirements for Vacuum Pumps in the General Semiconductor Industry

T/QGCML 3233-2024

Publish Date: 2024-03-05 Implement Date: 2024-03-20 For services related to genuine standard inquiry, procurement, translation, and other related services in China, please Contact Us

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Basic Information

Standard Code: T/QGCML 3233-2024

Standard Type: Group standards

Standard Status: Active

is_force_gb: no

CCS Name: -

ICS Name: pump

Publish Date: 2024-03-05

Implement Date: 2024-03-20

Scope

Main technical content: This document specifies the terminology and definitions, main parameters, general requirements, technical requirements, test methods, inspection rules, marking, packaging, transportation, and storage of vacuum pumps in the semiconductor industry. This document is applicable to the production and inspection of vacuum pumps in the semiconductor industry.

Development Information

Related Standards

GB/T 3215-1982 Replaced

GB/T 3215-1982 Centrifugal pumps for refinery, chemical and petrochemical processes General technical specifications

Publish Date: 1982-10-08

GB/T 5660-1985 Replaced

GB/T 5660-1985 End-suction centrifugal pumps—Baseplate and installation dimensions

Publish Date: 1985-11-25

GB/T 5661-1985 Replaced

GB/T 5661-1985 End-suction centrifugal pumps—Dimensions of cavities for mechanical seals and for soft packing

Publish Date: 1985-11-25

GB/T 5662-1985 Replaced

GB/T 5662-1985 End-suction centrifugalpumps (rating 16 bar)—Designation, nominal duty point and dimensions

Publish Date: 1985-11-25

GB/T 6490.1-1986 Replaced

GB/T 6490.1-1986 Terms and definitions of water-turbine pumps

Publish Date: 1986-06-12

GB/T 6490.2-1986 Replaced

GB/T 6490.2-1986 Testing methods of water-turbine pump

Publish Date: 1986-06-12