T/CI 334-2024 Active Group standards

T/CI 334-2024 Design and technical requirements for vibration isolation system for semiconductor equipment

Publish Date: 1970-01-01 Implement Date: 1970-01-01 For services related to genuine standard inquiry, procurement, translation, and other related services in China, please Contact Us

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Basic Information

Standard Code: T/CI 334-2024

Standard Type: Group standards

Standard Status: Active

is_force_gb: no

CCS Name: -

ICS Name: -

Publish Date: 1970-01-01

Implement Date: 1970-01-01

Scope

This document specifies the design procedure, structural type, and technical requirements for vibration isolation systems used in semiconductor equipment. This document is applicable to the design of vibration isolation systems for semiconductor equipment where the vibration isolator is installed at the bottom. In this document, the instrument itself is considered as a defined load in the system.

Development Information

Word Count: 11 Thousand words

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