T/CIE 132-2022 Active Group standards

T/CIE 132-2022 Test methods for thin film thickness of magnetron sputtering equipment

Publish Date: 2022-08-10 Implement Date: 2022-08-10 For services related to genuine standard inquiry, procurement, translation, and other related services in China, please Contact Us

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Basic Information

Standard Code: T/CIE 132-2022

Standard Type: Group standards

Standard Status: Active

is_force_gb: no

CCS Name: Vacuum technology and equipment

ICS Name: Vacuum technology

Publish Date: 2022-08-10

Implement Date: 2022-08-10

Pages: 11 pages

Scope

This document specifies the test methods, test principles, test items, test environments, and test procedures for the film accuracy of magnetron sputtering equipment.
This document is applicable to the verification of the film deposition accuracy of magnetron sputtering equipment.