T/JSQA 127-2022 Active Group standards

T/JSQA 127-2022 Scanning exposure using ultra-high-pressure short-arc exposure light source

Publish Date: 2022-03-03 Implement Date: 2022-03-03 For services related to genuine standard inquiry, procurement, translation, and other related services in China, please Contact Us

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Basic Information

Standard Code: T/JSQA 127-2022

Standard Type: Group standards

Standard Status: Active

is_force_gb: no

CCS Name: Electrician

ICS Name: Fluorescent lamps and discharge lamps

Publish Date: 2022-03-03

Implement Date: 2022-03-03

Scope

Scope: This document specifies the terms and definitions, classification, and model naming, requirements, test methods, inspection rules, marking, packaging, transportation, and storage of ultra-high pressure short-arc exposure light sources for lithography machines. This document applies to ultra-high pressure short-arc exposure light sources for lithography machines, and other corresponding types of ultra-high pressure short-arc exposure light sources can also be referenced for implementation. Main technical content: Classification and model naming: Classification and model naming of exposure lamps; Technical requirements: Appearance and main dimensions, photoelectric parameters and average lifespan, appearance quality, lamp head firmness, coaxiality, startup performance, vibration performance, collision and impact performance, drop impact performance.