T/SZBX 178-2024 Active Group standards

T/SZBX 178-2024 Laser direct writing lithography equipment

Publish Date: 2024-07-29 Implement Date: 2024-07-30 For services related to genuine standard inquiry, procurement, translation, and other related services in China, please Contact Us

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Basic Information

Standard Code: T/SZBX 178-2024

Standard Type: Group standards

Standard Status: Active

is_force_gb: no

CCS Name: Electronic components and information technology

ICS Name: Optoelectronics, laser equipment

Publish Date: 2024-07-29

Implement Date: 2024-07-30

Scope

Scope: This document is applicable to laser direct writing lithography equipment (hereinafter referred to as lithography equipment) used in scenarios such as the manufacture of single-sided PCB boards; Main technical content: This document specifies the classification and coding/composition of laser direct writing lithography equipment, general requirements, technical requirements, test methods, inspection rules and markings, packaging, transportation, and storage.