GB/T 4855-1984
Abolished
T/EDASQUARE 010-2024
Active
Group standards
T/EDASQUARE 010-2024 Light Source-Mask Joint Optimization Data Input Format Specification
T/EDASQUARE 010-2024
Price:
$ 20.00
Basic Information
Standard Code:
T/EDASQUARE 010-2024
Standard Type:
Group standards
Standard Status:
Active
is_force_gb:
no
CCS Name:
-
ICS Name:
Integrated circuits, microelectronics
Publish Date:
2024-09-21
Implement Date:
2024-09-22
Scope
Main technical content: This document specifies the data structure of the input format for joint optimization of light sources and masks. This document is applicable to the field of wafer manufacturing, including wafer manufacturing plants (covering the manufacturing of memory and logic chips) themselves and the corresponding computing lithography software support units. This standard is applicable to all process levels in all nodes starting from the 28nm technology node and subsequent more advanced processes.
Development Information
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