GB/T 4855-1984
Abolished
T/CSTM 00537-2021
Active
Group standards
T/CSTM 00537-2021 Micro-nano thin film phase change temperature testing and light power analysis method
T/CSTM 00537-2021 Micro-nano thin film phase change temperature testing and light power analysis method
Price:
$ 20.00
Basic Information
Standard Code:
T/CSTM 00537-2021
Standard Type:
Group standards
Standard Status:
Active
is_force_gb:
no
CCS Name:
Electronic components and information technology
ICS Name:
Integrated circuits, microelectronics
Publish Date:
2021-05-11
Implement Date:
2021-08-11
Scope
Scope: This document specifies the terms and definitions, principles, instruments and reagents, sample processing, instrument calibration, testing process, data processing, uncertainty evaluation, and test reports for testing the phase transition temperature of thin film materials using optical power analysis method. This document is applicable to the testing of the phase transition temperature of thin film materials with a thickness of 5 nm to 100 μm. The thin film materials should exhibit different light reflectivity before and after phase transition, and they should not decompose or evaporate under heating within the testing temperature range. Materials with a thickness greater than 100 μm can be tested with reference to this document. Main technical contents: This document specifies the terms and definitions, principles, instruments and reagents, sample processing, instrument calibration, testing process, data processing, uncertainty evaluation, and test reports for testing the phase transition temperature of thin film materials using optical power analysis method. This document is applicable to the testing of the phase transition temperature of thin film materials with a thickness of 5 nm to 100 μm. The thin film materials should exhibit different light reflectivity before and after phase transition, and they should not decompose or evaporate under heating within the testing temperature range. Materials with a thickness greater than 100 μm can be tested with reference to this document.
Development Information
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