GB/T 14264-1993
Replaced
T/TMAC 371-2026
Active
Group standards
T/TMAC 371-2026 High-precision dark field scanning wafer defect detection equipment
T/TMAC 371-2026 High-precision dark field scanning wafer defect detection equipment
Price:
$ 20.00
Basic Information
Standard Code:
T/TMAC 371-2026
Standard Type:
Group standards
Standard Status:
Active
is_force_gb:
no
CCS Name:
Medical electronic instruments and equipment
ICS Name:
Integrated Components of Semiconductor Devices
Publish Date:
2026-03-30
Implement Date:
2026-03-30
Scope
This document is applicable to equipment used for the automated dark-field detection of micron-level and sub-micron-level surface defects on silicon wafers and compound semiconductor wafers. This document specifies the technical requirements, test methods, inspection rules, and marking, packaging, transportation, and storage for high-precision dark-field scanning wafer defect detection equipment.
Development Information
Related Standards
GB/T 14844-1993
Replaced
GB/T 14844-1993 Designations of semiconductor materials
GB/T 17573-1998
Active
GB/T 17573-1998 Semiconductor devices Discrete devices and integrated circuits Part 1:General
GB/T 12560-1999
Active
GB/T 12560-1999 Semiconductor devices Sectional specification for discrete devices
GB/T 11499-2001
Active
GB/T 11499-2001 Letter symbols for discrete semiconductor devices
GB/T 20521-2006
Active