T/CEPEA 0102-2024 Active Group standards

T/CEPEA 0102-2024 Technical specification for vacuum wafer handling manipulator

Publish Date: 2025-12-19 Implement Date: 2026-01-01 For services related to genuine standard inquiry, procurement, translation, and other related services in China, please Contact Us

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Basic Information

Standard Code: T/CEPEA 0102-2024

Standard Type: Group standards

Standard Status: Active

is_force_gb: no

CCS Name: Orthopaedic surgery, orthopaedic instruments

ICS Name: Integrated Industrial Automation System

Publish Date: 2025-12-19

Implement Date: 2026-01-01

Scope

This document specifies the technical requirements, inspection rules, inspection methods, and reference performance indicators for vacuum wafer handling robots. It is applicable to handling robots that transport 100 mm to 300 mm wafers in a vacuum environment. The content includes term definitions, structural usage classification, technical requirements (appearance, function, performance, safety, environment, electromagnetic compatibility, reliability), inspection rules and methods, nameplates and packaging, accompanying documents, and performance indicators for typical scenarios.

Development Information

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