T/CSTA 0052-2023 Active Group standards

T/CSTA 0052-2023 Ultra-high purity stainless steel rod for semiconductor manufacturing equipment

Publish Date: 2023-11-30 Implement Date: 2023-11-30 For services related to genuine standard inquiry, procurement, translation, and other related services in China, please Contact Us

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Basic Information

Standard Code: T/CSTA 0052-2023

Standard Type: Group standards

Standard Status: Active

is_force_gb: no

CCS Name: -

ICS Name: \nSteel rods and steel bars

Publish Date: 2023-11-30

Implement Date: 2023-11-30

Scope

Main technical content: This document specifies the classification, ordering content, dimensions, shapes, weights, technical requirements, test methods, inspection rules, packaging, marking, and quality certificates of ultra-high purity stainless steel rods (collectively referred to as round steel, square steel, flat steel, and hexagonal steel, hereinafter referred to as steel rods) used in semiconductor manufacturing equipment. This document applies to ultra-high purity stainless steel hot-rolled rods, cold-drawn blanks, and cold-drawn rods with dimensions (diameter, edge length, thickness, or distance between opposite edges, hereinafter referred to as dimensions) not exceeding 150mm, used in semiconductor manufacturing equipment valves and steel pipes.