T/SHPTA 123-2025 Active Group standards

T/SHPTA 123-2025 is a special PTFE material used in semiconductor cleaning equipment.

T/SHPTA 123-2025 Specialty material for polytetrafluoroethylene used in semiconductor cleaning equipment

Publish Date: 2025-04-29 Implement Date: 2025-05-29 For services related to genuine standard inquiry, procurement, translation, and other related services in China, please Contact Us
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Basic Information

Standard Code: T/SHPTA 123-2025
Standard Type: Group standards
Standard Status: Active
is_force_gb: no
CCS Name: Synthetic resins and plastics
ICS Name: Thermoplastic plastics
Publish Date: 2025-04-29
Implement Date: 2025-05-29

Scope

Scope: This document specifies the technical requirements, test methods, inspection rules, and marking, packaging, transportation, and storage of special PTFE materials for semiconductor cleaning equipment. Main technical content: This document is applicable to white powder-like PTFE resins prepared by polymerizing and drying tetrafluoroethylene monomers.

Development Information

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