T/NMSP T/NMSP.MZB04.04-2024
Active
T/CHBAS 32-2023
Active
Group standards
T/CHBAS 32-2023 Mixed gas for integrated circuits containing 3% deuterium/nitrogen
T/CHBAS 32-2023 Mixed gas for integrated circuits containing 3% deuterium/nitrogen
Price:
$ 20.00
Basic Information
Standard Code:
T/CHBAS 32-2023
Standard Type:
Group standards
Standard Status:
Active
is_force_gb:
no
CCS Name:
-
ICS Name:
Other
Publish Date:
2023-07-27
Implement Date:
2023-07-27
Scope
Main technical content: This document specifies the technical requirements, test methods, inspection rules, marking, labeling, packaging, transportation, storage, and safety requirements for a mixed gas of 3% deuterium/nitrogen used in integrated circuits. This document is applicable to a mixed gas of 3% deuterium/nitrogen used in integrated circuits (hereinafter referred to as 3% deuterium/nitrogen). Deuterium-nitrogen mixtures with other component ratios can be referenced and implemented accordingly.
Development Information
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