GB/T 2413-1981
Active
T/CEMIA 030-2022
Active
Group standards
T/CEMIA 030-2022 Positive photoresist developer for semiconductor manufacture
T/CEMIA 030-2022 Positive photoresist developer for semiconductor manufacture
Price:
$ 24.00
Basic Information
Standard Code:
T/CEMIA 030-2022
Standard Type:
Group standards
Standard Status:
Active
is_force_gb:
no
CCS Name:
Electronic devices and specialized materials, parts, and structural components
ICS Name:
Special materials for electronic technology
Publish Date:
2022-04-20
Implement Date:
2022-07-20
Pages:
16 pages
Scope
This document specifies the classification and marking, requirements, testing methods, inspection rules, and labeling, packaging, transportation, storage, and safety of positive developer solutions for semiconductors.
This document is applicable to positive developer solutions for semiconductors, the main components of which are tetramethylammonium hydroxide obtained by electrolysis of quaternary ammonium salts.
The basic information of tetramethylammonium hydroxide is provided in Appendix A, Section A.1.
Development Information
Referenced Standards
GB 190-1990 Labels for packages of dangerous goods
GB 190-2009 Packing symbol of dangerous goods
GB/T 601-2002 Chemical reagent Preparations of standard volumetric solutions
GB/T 601-2016 Chemical reagent—Preparations of reference titration solutions
GB/T 602-2002 Chemical reagent—Preparations of standard solutions for impurity
GB/T 603-2002 Chemical reagent—Preparations of reagent solutions for use in test methods
GB/T 603-2023 Chemical reagent—Preparations of reagent solutions for use in test methods
GB/T 3143-1982 Color determination method of liquid chemicals (Hazen unit—platinum-cobalt scale)
GB/T 6680-2003 General rules for sampling liquid chemical products
GB/T 8170-1987 Rules for rounding off of numberical values
GB/T 8170-2008 Rules of rounding off for numerical values & expression and judgement of limiting values
GB/T 8979-1996 Pure nitrogen
GB/T 8979-2008 Pure nitrogen and high purity nitrogen and ultra pure nitrogen
GB/T 11446.1-1997 Electronic grade water
GB/T 11446.1-2013 Electronic grade water
GB 15258-1999 General rules for preparation of precautionary label for industrial chemicals
GB 15258-2009 General rules for preparation of precautionary label for chemicals
GB 15603-1995 Rule for storage of chemical dangers
GB 15603-2022 General rules for the hazardous chemicals warehouse storage
GB/T 34672-2017 Chemical reagent—General rules for the ion chromatography
GB/T 37403-2019 Tetramethylammonium hydroxide developer for thin film transistor-liquid crystal display(TFT-LCD)
GB 50073-2013 Code for design of clean room
SJ/T 11634-2016 Determination of Methanol in Developer Solution for Electronic Industry by Headspace Gas Chromatography
SJ/T 11635-2016 Determination of carbonate ion in developer used in electronic industry by automatic potentiometric titration
SJ/T 11636-2016 Determination of Tetramethylammonium Hydroxide in Developer Solution for Electronics Industry Using Automatic Potentiometric Titration Method
SJ/T 11638-2016 The testing methods for particles in electronic chemicals
GB/T 8979-2025 Pure nitrogen,high purity nitrogen and ultra pure nitrogen
GB/T 602-2026 Chemical reagent—Preparations of standard solutions for impurity
Related Standards
GB/T 3389.4-1982
Replaced
GB/T 3389.4-1982 Test methods for the properties of piezoelectric ceramics—Longitudinal length extension vibration mode for rod
GB/T 5594.1-1985
Active
GB/T 5594.1-1985 Test methods for properties of structure ceramic used in electronic components—Test method for gas-tightness
GB/T 5594.2-1985
Active
GB/T 5594.2-1985 Test methods for properties of structure ceramic used in electronic components—Test method for Youngs elastic modulus and Poisson ratio
GB/T 5594.3-1985
Replaced
GB/T 5594.3-1985 Test methods for properties of structure ceramic used in electronic components—Test method for mean coefficient of linear expansion
GB/T 5594.4-1985
Replaced