T/CSA 092-2024 Active Group standards

Technical Specifications of the Tray Induction Heating System for MOCVD Equipment, Model T/CSA 092-2024

T/CSA 092-2024

Publish Date: 2024-11-21 Implement Date: 2024-11-21 For services related to genuine standard inquiry, procurement, translation, and other related services in China, please Contact Us

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Basic Information

Standard Code: T/CSA 092-2024

Standard Type: Group standards

Standard Status: Active

is_force_gb: no

CCS Name: Electric material production equipment

ICS Name: The characteristics and design of machines, devices, and equipment

Publish Date: 2024-11-21

Implement Date: 2024-11-21

Scope

Scope: This document specifies the technical requirements and test methods for the induction heating system of the MOCVD equipment tray (hereinafter referred to as the "induction heating system"). This document is applicable to the research and development, preparation, testing and analysis, and evaluation of the induction heating system. Main technical content: This document specifies the technical requirements and test methods for the induction heating system of the MOCVD equipment tray (hereinafter referred to as the "induction heating system"). This document is applicable to the research and development, preparation, testing and analysis, and evaluation of the induction heating system.