DZ/T 0101.12-1994
Active
T/ICMTIA 1-2019
Active
Group standards
T/ICMTIA 1-2019 Industrial Alliance for Technology Innovation of Integrated Circuit Materials - Gas Basic Specification
T/ICMTIA 1-2019 Industrial Alliance for Technology Innovation of Integrated Circuit Materials - Gas Basic Specification
Price:
$ 29.00
Basic Information
Standard Code:
T/ICMTIA 1-2019
Standard Type:
Group standards
Standard Status:
Active
is_force_gb:
no
CCS Name:
-
ICS Name:
-
Publish Date:
1970-01-01
Implement Date:
1970-01-01
Scope
This standard specifies the management requirements and relevant testing procedures for the production, R&D, and use of gases used in integrated circuit manufacturing. It serves as a guide for gas production management and usage. The purpose of this standard is to establish unified and consensus-based gas management norms among alliance members, ensuring that gas product quality can be more stable and reliable, and better meeting the needs of integrated circuit applications. This standard was initiated and drafted by the alliance member units, and is voluntarily adopted by the industry after its release.
Development Information
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