T/ZZB 0093-2016 Active Group standards

T/ZZB 0093-2016 High-purity titanium sputtering target for integrated circuits

Publish Date: 2016-09-10 Implement Date: 1970-01-01 For services related to genuine standard inquiry, procurement, translation, and other related services in China, please Contact Us

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Basic Information

Standard Code: T/ZZB 0093-2016

Standard Type: Group standards

Standard Status: Active

is_force_gb: no

CCS Name: Medical ultrasound, laser, and high-frequency instruments and equipment

ICS Name: Ti products

Publish Date: 2016-09-10

Implement Date: 1970-01-01

Scope

This standard specifies the terminology, definitions, basic requirements, technical requirements, test methods, inspection rules, marking, packaging, transportation, storage, quality commitments, and service guarantees for high-purity titanium sputtering targets used in integrated circuits. This standard applies to all types of titanium sputtering targets used in the fabrication of electronic films in integrated circuits.