T/CNIA 0117-2021 Active Group standards

T/CNIA 0117-2021 Determination of Trace Anion Content in High-purity Hydrogen Fluoride for Use in the Electronic Industry by Ion Chromatography

Publish Date: 2021-03-19 Implement Date: 2021-09-01 For services related to genuine standard inquiry, procurement, translation, and other related services in China, please Contact Us

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Basic Information

Standard Code: T/CNIA 0117-2021

Standard Type: Group standards

Standard Status: Active

is_force_gb: no

CCS Name: -

ICS Name: Chemical analysis

Publish Date: 2021-03-19

Implement Date: 2021-09-01

Scope

Main technical content: This document specifies the method for determining trace anions (chloride, nitrate, phosphate, and sulfate) in high-purity hydrofluoric acid used in the electronics industry by ion chromatography. This document is applicable to the determination of trace anion content in high-purity hydrofluoric acid used in the electronics industry. The measurement range is 10.000 μg/kg to 5000 μg/kg.