GB/T 14390-2008
Active
T/SDAMA 008-2025
Active
Group standards
T/SDAMA 008-2025 Silicon Carbide Ceramic Crucible
T/SDAMA 008-2025 Silicon carbide ceramic crystal boat
Price:
$ 20.00
Basic Information
Standard Code:
T/SDAMA 008-2025
Standard Type:
Group standards
Standard Status:
Active
is_force_gb:
no
CCS Name:
-
ICS Name:
High-end ceramics
Publish Date:
2025-03-17
Implement Date:
2025-03-17
Scope
Main technical content: This document specifies the classification and dimensional specifications, technical requirements, test methods, inspection rules, and packaging, marking, transportation, and storage of silicon carbide ceramic wafer boats. This document is applicable to silicon carbide ceramic wafer boats used in the fabrication process of semiconductor integrated circuits (ICs), with an operating temperature not exceeding 1350°C.
Development Information
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