T/GVS 010-2022 Active Group standards

T/GVS 010-2022 Universal technical requirements for vacuum spinning coating equipment

Publish Date: 2022-09-23 Implement Date: 2022-09-23 For services related to genuine standard inquiry, procurement, translation, and other related services in China, please Contact Us

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Basic Information

Standard Code: T/GVS 010-2022

Standard Type: Group standards

Standard Status: Active

is_force_gb: no

CCS Name: Mechanical

ICS Name: Vacuum technology

Publish Date: 2022-09-23

Implement Date: 2022-09-23

Scope

Scope: This document specifies the terms and definitions, composition, technical requirements, test methods, inspection rules, marking, packaging, transportation, and storage of general technical requirements for vacuum coil coating equipment. This document is applicable to vacuum evaporation coil coating equipment, vacuum magnetron sputtering coil coating equipment, and vacuum chemical vapor deposition (CVD) coil coating equipment. Main technical content: It specifies the terms and definitions, composition, technical requirements, test methods, inspection rules, marking, packaging, transportation, and storage of general technical requirements for vacuum coil coating equipment. It is applicable to vacuum evaporation coil coating equipment, vacuum magnetron sputtering coil coating equipment, and vacuum chemical vapor deposition (CVD) coil coating equipment.