T/CAMS 173-2023 Active Group standards

T/CAMS 173-2023 The method for qualifying silicon-based pressure sensors using piezoresistive pressure sensing technology

Publish Date: 2023-09-25 Implement Date: 2023-11-01 For services related to genuine standard inquiry, procurement, translation, and other related services in China, please Contact Us

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Basic Information

Standard Code: T/CAMS 173-2023

Standard Type: Group standards

Standard Status: Active

is_force_gb: no

CCS Name: Temperature and pressure gauges

ICS Name: The measurement of force, gravity, and pressure.

Publish Date: 2023-09-25

Implement Date: 2023-11-01

Scope

Scope: This document is applicable to the conduct of aging and testing of silicon-based piezoresistive pressure sensors. The types of sensors mainly include absolute pressure, gauge pressure, and differential pressure, etc. Main technical content: This document specifies the test requirements, test conditions, test items and steps, fault handling, data processing, and result analysis for the aging and testing of silicon-based piezoresistive pressure sensors.