T/YGAZXH 13-2025 Active Group standards

T/YGAZXH 13-2025 Photovoltaic cell process equipment and atomic layer deposition (ALD) coating equipment technical specifications

T/YGAZXH 13-2025 Photovoltaic cell process equipment and atomic layer deposition (ALD) coating equipment technical specifications

Publish Date: 2025-07-16 Implement Date: 2025-08-01 For services related to genuine standard inquiry, procurement, translation, and other related services in China, please Contact Us
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Basic Information

Standard Code: T/YGAZXH 13-2025
Standard Type: Group standards
Standard Status: Active
is_force_gb: no
CCS Name: Normal diagnostic instruments
ICS Name: Comprehensive Electrical Engineering
Publish Date: 2025-07-16
Implement Date: 2025-08-01

Scope

Main technical content: This document provides the working environment and working conditions of the atomic layer deposition coating equipment, and stipulates the technical requirements, test methods, inspection rules, marking, packaging, transportation, and storage. This document is applicable to the manufacture and inspection of atomic layer deposition coating equipment used in the production of solar cells with a tunned oxide layer passivation contact (TopCon, BC) and other battery applications

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