DB35/T 1248-2012 Active Fujian ProvinceLocal standards

DB35/T 1248-2012 Determination of Impurity Content in Gallium Arsenide Gas for Use in Electronic Industry by Gas Chromatography

Publish Date: 2012-05-04 Implement Date: 2012-08-05 For services related to genuine standard inquiry, procurement, translation, and other related services in China, please Contact Us

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Basic Information

Standard Code: DB35/T 1248-2012

Standard Type: Local standards

Standard Status: Active

is_force_gb: no

CCS Name: Industrial gases and chemical gases

ICS Name: Chemical analysis

Publish Date: 2012-05-04

Implement Date: 2012-08-05

Pages: 12 pages

Scope

This standard specifies the method for determining the impurity content in germanane gas used in the electronics industry by gas chromatography. This standard is applicable to the determination of hydrogen, oxygen (argon), nitrogen, methane, carbon monoxide, and carbon dioxide in germanane gas used in the electronics industry. The detection limits of each impurity component are: hydrogen: 0.02 μmol/mol, oxygen (argon): 0.01 μmol/mol, nitrogen: 0.01 μmol/mol, methane: 0.005 μmol/mol, carbon monoxide: 0.02 μmol/mol, and carbon dioxide: 0.005 μmol/mol; the detection linear range of each impurity component is: hydrogen, oxygen (argon), and nitrogen ≤ 1000 μmol/mol, and methane, carbon monoxide, and carbon dioxide ≤ 2000 μmol/mol.