GB/T 14264-1993
Replaced
T/CASME 1846-2024
Active
Group standards
T/CASME 1846-2024 Semiconductor equipment component cleaning technical specification
T/CASME 1846-2024 Semiconductor equipment component cleaning technical specification
Price:
$ 20.00
Basic Information
Standard Code:
T/CASME 1846-2024
Standard Type:
Group standards
Standard Status:
Active
is_force_gb:
no
CCS Name:
Electronic components and information technology
ICS Name:
Integrated Components of Semiconductor Devices
Publish Date:
2024-12-25
Implement Date:
2024-12-31
Scope
Scope: This document is applicable to the cleaning of semiconductor equipment parts that have not been painted or electroplated; Main technical content: This document specifies the general requirements for the cleaning of semiconductor equipment parts, surface treatment, chemical cleaning, appearance inspection, labeling, packaging, and storage.
Development Information
Related Standards
GB/T 14844-1993
Replaced
GB/T 14844-1993 Designations of semiconductor materials
GB/T 17573-1998
Active
GB/T 17573-1998 Semiconductor devices Discrete devices and integrated circuits Part 1:General
GB/T 12560-1999
Active
GB/T 12560-1999 Semiconductor devices Sectional specification for discrete devices
GB/T 11499-2001
Active
GB/T 11499-2001 Letter symbols for discrete semiconductor devices
GB/T 20521-2006
Active