SJ 21254-2018 Active Industry standards-Electronics

SJ 21254-2018 Technological verification procedures for double side mask aligner

Publish Date: 2018-01-18 Implement Date: 2018-05-01 For services related to genuine standard inquiry, procurement, translation, and other related services in China, please Contact Us

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Basic Information

Standard Code: SJ 21254-2018

Standard Type: Industry standards

Standard Status: Active

is_force_gb: no

CCS Name: -

ICS Name: -

Publish Date: 2018-01-18

Implement Date: 2018-05-01

Pages: 13 pages

Scope

This standard specifies the general requirements, verification conditions, and verification methods for the process verification of double-sided lithography machines. This standard applies to the verification of the process performance of double-sided lithography machines (hereinafter referred to as lithography machines).

Development Information

Pages: 13 pages

Referenced Standards

GB/T 25915.1-2010 Cleanrooms and associated controlled environments—Part 1:Classification of air cleanliness

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