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GB/T 14601-2009 Active
GB/T 14601-2009 Gas for electronic industry—Ammonia
Abstract
This standard applies to the semiconductor industry, the chemical vapor deposition of silicon nitride and gallium nitride, and can also be used for the nitriding of silicon or silicon oxide.
Molecular formula: NH3.
Relative molecular mass: 17.031 (according to the 2005 International Relative Atomic Mass).
General Product Information
| Document Type | National standards |
|---|---|
| Standard Status | Active |
| Standard Code | GB/T 14601-2009 |
| CCS | Industrial gases and chemical gases |
| ICS | Industrial gases |
| Implement Date | 2010-05-01 |
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