GB/T 14601-2009 Active National standards

GB/T 14601-2009 Gas for electronic industry—Ammonia

Publish Date: 2009-10-30 Implement Date: 2010-05-01 For services related to genuine standard inquiry, procurement, translation, and other related services in China, please Contact Us

Basic Information

Standard Code: GB/T 14601-2009

Standard Type: National standards

Standard Status: Active

is_force_gb: no

CCS Name: Industrial gases and chemical gases

ICS Name: Industrial gases

Publish Date: 2009-10-30

Implement Date: 2010-05-01

Pages: 9 pages

Scope

This standard applies to the semiconductor industry, the chemical vapor deposition of silicon nitride and gallium nitride, and can also be used for the nitriding of silicon or silicon oxide.
Molecular formula: NH3.
Relative molecular mass: 17.031 (according to the 2005 International Relative Atomic Mass).

Development Information

Word Count: 14 Thousand words Pages: 9 pages

Replace the following standards

GB/T 14601-1993 Gases for electronic industry—High purity ammonia

Superseded by the following standards

GB/T 14601-2025 Electronic specialty gas—Ammonia

Referenced Standards

GB 190-2009 Packing symbol of dangerous goods 气瓶安全监察规程压力容器安全技术监察规程 GB/T 3723-1999 Sampling of chemical products for industrial use—Safety in sampling GB 7144-1999 Colored cylinder mark for gases GB/T 7144-2016 Coloured cylinder mark for gases GB 14193-1993 Rules for filling of liquefied gas cylinders GB/T 14193-2009 Rules for filling of liquefied gas cylinders GB/T 14193.1-2025 Rules for the filling of liquefied gas cylinders—Part1:Industrial gas cylinder

Related Standards

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Publish Date: 1985-03-01

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Publish Date: 1988-03-15

GB/T 10627-1989 Replaced

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Publish Date: 1989-03-01

GB/T 10628-1989 Replaced

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Publish Date: 1989-03-22

GB 13548-1992 Replaced

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Publish Date: 1992-06-29

GB 13591-1992 Replaced

GB 13591-1992 Rules for the filling of dissolved acetylene

Publish Date: 1992-08-05