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GB/T 29506-2013 Active
GB/T 29506-2013 300 mm polished monocrystalline silicon wafers
Abstract
This standard specifies the terms and definitions, technical requirements, test methods, inspection rules, and marking, packaging, transportation, and storage for silicon single-crystal polished wafers with a diameter of 300 mm, a P-type, a 100 crystal orientation, and a resistivity of 0.5 Ω·cm to 20 Ω·cm.
This standard applies to silicon single-crystal polished wafers prepared by double-sided polishing of 300 mm directly pulled single-crystal grinding wafers. The products are mainly used to meet the substrate wafer requirements of integrated circuits (ICs) with a line width of 90 nm.
General Product Information
| Document Type | National standards |
|---|---|
| Standard Status | Active |
| Standard Code | GB/T 29506-2013 |
| CCS | Element semiconductor materials |
| ICS | Semiconductor materials |
| Implement Date | 2014-02-01 |
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