PDF
GB/T 24581-2022 Active
GB/T 24581-2022 Test method for Ⅲ and Ⅴ impurities content in single crystal silicon—Low temperature FT-IR analysis method
Abstract
This document describes the method of determining the impurity content of Group III and Group V elements in silicon single crystals using low-temperature Fourier transform infrared spectroscopy.
This document is applicable to the determination of the impurity content of Group III and Group V elements (aluminum (Al), antimony (Sb), arsenic (As), boron (B), gallium (Ga), indium (In), and phosphorus (P)) in silicon single crystals. The measurement range of each element (in terms of atomic number) is 1.0×10 10 cm -3 to 4.1×10 14 cm -3 .
General Product Information
| Document Type | National standards |
|---|---|
| Standard Status | Active |
| Standard Code | GB/T 24581-2022 |
| CCS | Analysis methods for semi-metallic and semiconductor materials |
| ICS | \nMetal material testing |
| Implement Date | 2022-10-01 |
Price
$ 50
Subtotal
$ 50
Tax
$ 0.00
Order Total (incl. tax)
$ 50