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GB/T 14851-2009 Active
GB/T 14851-2009 Gas for electronic industry—Phosphine
Abstract
This standard specifies the technical requirements, test methods, and packaging, marking, storage, transportation, and safety of phosphine used in the electronics industry.
This standard applies to phosphine products obtained by methods such as the thermal decomposition of phosphorous acid, the hydrolysis of phosphides, and the reaction of elemental phosphorus with water or alkali, and then refined. It is mainly used for epitaxy, ion implantation, and doping in the production of semiconductor devices and integrated circuits.
Molecular formula: PH3.
Relative molecular mass: 33.99758 (calculated according to the 2005 International Relative Atomic Mass).
General Product Information
| Document Type | National standards |
|---|---|
| Standard Status | Active |
| Standard Code | GB/T 14851-2009 |
| CCS | Industrial gases and chemical gases |
| ICS | Industrial gases |
| Implement Date | 2010-05-01 |
Price
$ 29.00
Subtotal
$ 29.00
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$ 29.00