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GB/T 4061-2009 Active
GB/T 4061-2009 Polycrystalline silicon-examination method-assessment of sandwiches on cross-section by chemical corrosion
Abstract
This standard specifies the method for chemical corrosion testing of the cross-sectional interlayer of silicon polycrystalline rods reduced with hydrogen in a reduction furnace using trichlorosilane and silicon tetrachloride as raw materials.
The inspection of the cross-sectional interlayer in this standard is applicable to silicon polycrystalline rods grown by reduction with hydrogen in a reduction furnace, using trichlorosilane and silicon tetrachloride as raw materials, with a fine silicon core as the heating element.
General Product Information
| Document Type | National standards |
|---|---|
| Standard Status | Active |
| Standard Code | GB/T 4061-2009 |
| CCS | Semi-metals and semiconductor materials |
| ICS | Semiconductor materials |
| Implement Date | 2010-06-01 |
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