GB/T 4061-2009 Active National standards

GB/T 4061-2009 Polycrystalline silicon-examination method-assessment of sandwiches on cross-section by chemical corrosion

Publish Date: 2009-10-30 Implement Date: 2010-06-01 For services related to genuine standard inquiry, procurement, translation, and other related services in China, please Contact Us

Basic Information

Standard Code: GB/T 4061-2009

Standard Type: National standards

Standard Status: Active

is_force_gb: no

CCS Name: Semi-metals and semiconductor materials

ICS Name: Semiconductor materials

Publish Date: 2009-10-30

Implement Date: 2010-06-01

Pages: 4 pages

Scope

This standard specifies the method for chemical corrosion testing of the cross-sectional interlayer of silicon polycrystalline rods reduced with hydrogen in a reduction furnace using trichlorosilane and silicon tetrachloride as raw materials.
The inspection of the cross-sectional interlayer in this standard is applicable to silicon polycrystalline rods grown by reduction with hydrogen in a reduction furnace, using trichlorosilane and silicon tetrachloride as raw materials, with a fine silicon core as the heating element.