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GB/T 36306-2018
GB/T 36306-2018 Cleanrooms and associated controlled environments—Guidelines for airborne chemical contamination control
Abstract
This standard provides guidelines for the detection and control of air chemical pollution in cleanrooms and related controlled environments.
This standard is applicable to air chemical pollution control in cleanrooms and related controlled environments in microelectronics and optoelectronics factories, as well as in production and research facilities with special requirements.
This standard is not applicable to nuclear energy and military applications.
General Product Information
| Document Type | National standards |
|---|---|
| Standard Status | Replaced |
| Standard Code | GB/T 36306-2018 |
| CCS | Industrial dust and gas prevention and control technology |
| ICS | Clean rooms (sterile rooms) and related controlled environments |
| Implement Date | 2018-10-01 |
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$ 38.00