GB/T 25915.1-2010
Replaced
GB/T 36306-2018
Replaced
National standards
GB/T 36306-2018 Cleanrooms and associated controlled environments—Guidelines for airborne chemical contamination control
GB/T 36306-2018 Cleanrooms and associated controlled environments—Guidelines for airborne chemical contamination control
Basic Information
Standard Code:
GB/T 36306-2018
Standard Type:
National standards
Standard Status:
Replaced
is_force_gb:
no
CCS Name:
Industrial dust and gas prevention and control technology
ICS Name:
Clean rooms (sterile rooms) and related controlled environments
Publish Date:
2018-06-07
Implement Date:
2018-10-01
Pages:
20 pages
Scope
This standard provides guidelines for the detection and control of air chemical pollution in cleanrooms and related controlled environments.
This standard is applicable to air chemical pollution control in cleanrooms and related controlled environments in microelectronics and optoelectronics factories, as well as in production and research facilities with special requirements.
This standard is not applicable to nuclear energy and military applications.
Development Information
Superseded by the following standards
Referenced Standards
Related Standards
GB/T 25915.2-2010
Replaced
GB/T 25915.2-2010 Cleanrooms and associated controlled environments—Part 2:Specifications for testing and monitoring to prove continued compliance with GB/T 25915.1
GB/T 25915.3-2010
Replaced
GB/T 25915.3-2010 Cleanrooms and associated controlled environments—Part 3:Test methods
GB/T 25915.4-2010
Active
GB/T 25915.4-2010 Cleanrooms and associated controlled environments—Part 4:Design,construction and start-up
GB/T 25915.5-2010
Active
GB/T 25915.5-2010 Cleanrooms and associated controlled environments—Part 5:Operations
GB/T 25915.7-2010
Active