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GB/T 32386-2015 Active
GB/T 32386-2015 Gases for electronic industry—Tungsten hexaflouride
Abstract
This standard specifies the technical requirements, test methods, packaging, marking, storage and transportation, and safety of tungsten hexafluoride. This standard applies to tungsten hexafluoride produced by chemical synthesis and purified by refining. This product is mainly used in the electronics industry for metal tungsten chemical vapor deposition processes, the preparation of tungsten materials, etc. Molecular formula: WF6. Molecular weight: 297.8304192 (calculated based on the 2009 International Relative Atomic Mass).
General Product Information
| Document Type | National standards |
|---|---|
| Standard Status | Active |
| Standard Code | GB/T 32386-2015 |
| CCS | Industrial gases and chemical gases |
| ICS | Industrial gases |
| Implement Date | 2016-07-01 |
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