T/GVS 007-2022 Active
T/GVS 007-2022 Radio Frequency Power Dynamic Resistance Test Method
Abstract
Scope: This document specifies the terms and definitions, principles, test environment conditions, instrumentation, test methods, and test reports for the dynamic impedance test of radio frequency power supplies. This document is applicable to the dynamic impedance test of radio frequency power supplies with an output frequency of 0.2 MHz to 100 MHz in applications such as semiconductor etching and thin film deposition. Main technical content: It specifies the terms and definitions, principles, test environment conditions, instrumentation, test methods, and test reports for the dynamic impedance test of radio frequency power supplies. It is applicable to the dynamic impedance test of radio frequency power supplies with an output frequency of 0.2 MHz to 100 MHz in applications such as semiconductor etching and thin film deposition.
General Product Information
| Document Type | Group standards |
|---|---|
| Standard Status | Active |
| Standard Code | T/GVS 007-2022 |
| CCS | Electrician |
| ICS | Electrician and electronic testing |
| Implement Date | 2022-07-11 |