GB/T 25915.12-2021 Active
GB/T 25915.12-2021 Cleanrooms and associated controlled environments—Part 12: Specifications for monitoring of air cleanliness by nanoscale particle concentration
Abstract
This document sets forth the technical requirements for monitoring the concentration of "nanoscale" particles with a particle size not exceeding 0.1 μm (100 nm).
The monitoring techniques specified in this document are primarily intended for "dynamic" applications.
Note 1: The "nanoscale particles" referred to in this document refer to all nanomaterials that have a nanoscale dimension in one dimension (nanosheets), two dimensions (nanofibers), or three dimensions (nanoparticles).
Note 2: Please note that the actual characteristics of particles in cleanrooms are determined by the source of the particles and their physical properties.
Note 3: This document does not consider health and safety issues.
General Product Information
| Document Type | National standards |
|---|---|
| Standard Status | Active |
| Standard Code | GB/T 25915.12-2021 |
| CCS | Industrial dust and gas prevention and control technology |
| ICS | Clean rooms (sterile rooms) and related controlled environments |
| Implement Date | 2022-05-01 |