GB/T 25915.1-2010
Replaced
GB/T 25915.12-2021
Active
National standards
GB/T 25915.12-2021 Cleanrooms and associated controlled environments—Part 12: Specifications for monitoring of air cleanliness by nanoscale particle concentration
GB/T 25915.12-2021 Cleanrooms and associated controlled environments—Part 12: Specifications for monitoring of air cleanliness by nanoscale particle concentration
Basic Information
Standard Code:
GB/T 25915.12-2021
Standard Type:
National standards
Standard Status:
Active
is_force_gb:
no
CCS Name:
Industrial dust and gas prevention and control technology
ICS Name:
Clean rooms (sterile rooms) and related controlled environments
Publish Date:
2021-10-11
Implement Date:
2022-05-01
Publisher:
国家市场监督管理总局、国家标准化管理委员会
Technical Committee:
全国洁净室及相关受控环境标准化技术委员会(SAC/TC 319)
Pages:
14 pages
Scope
本文件给出了监测粒径限值不超过0.1 μm(100 nm)的“纳米尺度”粒子浓度的技术要求。
本文件给出的监测技术要求主要用于“动态”。
注1: 本文件提及的“纳米尺度粒子”是指所有在1维上(纳米片)、2维上(纳米纤维)或3维上(纳米粒子)具有纳米尺度的纳米物质。
注2: 请注意,洁净室内粒子的实际特性是由粒子的来源及其物理特性所决定的。
注3: 本文件未考虑健康与安全事项。
Development Information
Drafting Units:
中天道成(苏州)洁净技术有限公司、中国电子工程设计院有限公司、苏州苏信环境科技有限公司、苏州市计量测试院、江苏苏净工程建设有限公司、江苏嘉合洁净科技有限公司、中国标准化协会、国家纳米科学中心、中国合格评定国家认可中心、南京天加环境科技有限公司、美埃(中国)环境科技股份有限公司、中电投工程研究检测评定中心有限公司、吴江市华宇净化设备有限公司、常州祥明智能动力股份有限公司、北京恒泰建业工程项目管理有限公司、贺氏(苏州)特殊材料有限公司
Drafting Persons:
王尧、姜伟康、蔡杰、孙玉澄、王其祥、王大千、姜皓遐、朱兰、翟传明、蒋乃军、邴绍同、石小雷、高正、吴小泉、叶伟强、张敏、董玉平、郝胤博、惠旅峰、肖轶群
Same series standard
GB/T 25915.1-2021 Cleanrooms and associated controlled environments—Part 1:Classification of air cleanliness by particle concentration
GB/T 25915.2-2021 Cleanrooms and associated controlled environments—Part 2:Monitoring to provide evidence of cleanroom performance related to air cleanliness by particle concentration
GB/T 25915.8-2021 Cleanrooms and associated controlled environments—Part 8:Classification of air cleanliness by chemical concentration(ACC)
GB/T 25915.10-2021 Cleanrooms and associated controlled environments—Part 10:Classification of surface cleanliness by chemical concentration
Adopt standards
ISO 14644-12:2018
Related Standards
GB/T 25915.2-2010
Replaced
GB/T 25915.2-2010 Cleanrooms and associated controlled environments—Part 2:Specifications for testing and monitoring to prove continued compliance with GB/T 25915.1
GB/T 25915.3-2010
Replaced
GB/T 25915.3-2010 Cleanrooms and associated controlled environments—Part 3:Test methods
GB/T 25915.4-2010
Active
GB/T 25915.4-2010 Cleanrooms and associated controlled environments—Part 4:Design,construction and start-up
GB/T 25915.5-2010
Active
GB/T 25915.5-2010 Cleanrooms and associated controlled environments—Part 5:Operations
GB/T 25915.7-2010
Active