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GB/T 29504-2013 Active
GB/T 29504-2013 300 mm monocrystalline silicon
Abstract
This standard specifies the technical requirements, test methods, inspection rules, and marking, packaging, transportation, and storage for 300 mm diameter, P-type, single-crystal silicon with a crystal orientation of 100 and a resistivity of 0.5 Ω·cm to 20 Ω·cm.
This standard applies to single-crystal silicon prepared by the direct-pulling method, which is mainly used for manufacturing 300 mm silicon wafers that meet the technical requirements of integrated circuits (ICs) with a line width of 0.13 μm or less.
General Product Information
| Document Type | National standards |
|---|---|
| Standard Status | Active |
| Standard Code | GB/T 29504-2013 |
| CCS | Element semiconductor materials |
| ICS | Semiconductor materials |
| Implement Date | 2014-02-01 |
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$ 42
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$ 42
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$ 42