GB/T 34504-2017
GB/T 34504-2017 Measurement method for surface metal contamination on sapphire polished substrate wafer
Abstract
This standard specifies a method for testing the total reflection X-ray fluorescence spectra of residual metal elements on the surface of sapphire polished substrates with a depth of less than 5 nm. This standard is applicable to the quantitative measurement of residual elements on the surface of sapphire polished substrates, which are located between elements 11 (Na) and 92 (U) in the periodic table (excluding aluminum and oxygen), and have a surface density ranging from 109 atoms/cm2 to 1015 atoms/cm2. For other purposes, the measurement of residual metal elements on the surface of sapphire polished substrates can be carried out in accordance with this standard.
General Product Information
| Document Type | National standards |
|---|---|
| Standard Status | Replaced |
| Standard Code | GB/T 34504-2017 |
| CCS | Analysis methods for semi-metallic and semiconductor materials |
| ICS | \nMetal material testing |
| Implement Date | 2018-05-01 |