GB/T 34504-2017 Replaced National standards

GB/T 34504-2017 Measurement method for surface metal contamination on sapphire polished substrate wafer

Publish Date: 2017-10-14 Implement Date: 2018-05-01 For services related to genuine standard inquiry, procurement, translation, and other related services in China, please Contact Us

Basic Information

Standard Code: GB/T 34504-2017

Standard Type: National standards

Standard Status: Replaced

is_force_gb: no

CCS Name: Analysis methods for semi-metallic and semiconductor materials

ICS Name: \nMetal material testing

Publish Date: 2017-10-14

Implement Date: 2018-05-01

Pages: 16 pages

Scope

This standard specifies a method for testing the total reflection X-ray fluorescence spectra of residual metal elements on the surface of sapphire polished substrates with a depth of less than 5 nm. This standard is applicable to the quantitative measurement of residual elements on the surface of sapphire polished substrates, which are located between elements 11 (Na) and 92 (U) in the periodic table (excluding aluminum and oxygen), and have a surface density ranging from 109 atoms/cm2 to 1015 atoms/cm2. For other purposes, the measurement of residual metal elements on the surface of sapphire polished substrates can be carried out in accordance with this standard.