GB/T 34326-2017
GB/T 34326-2017 Surface chemical analysis—Depth profiling—Methods for ion beam alignment and the associated measurement of current or current density for depth profiling in AES and XPS
Abstract
This standard specifies the ion beam alignment methods used in Auger electron spectroscopy (AES) and X-ray photoelectron spectroscopy (XPS) to ensure good depth resolution of sputtering depth profiling and optimal surface cleaning effects. These methods are divided into two categories: one is to measure the ion beam current through a Faraday cup, and the other is to use imaging methods. The Faraday cup method also specifies the measurement of ion beam current density and beam distribution. These methods do not include the optimization of depth resolution. These methods are suitable for ion guns with a beam spot diameter of less than 1 mm.
General Product Information
| Document Type | National standards |
|---|---|
| Standard Status | Replaced |
| Standard Code | GB/T 34326-2017 |
| CCS | Basic standards and general methods |
| ICS | Chemical analysis |
| Implement Date | 2018-08-01 |