PDF
GB/T 29190-2012 Active
GB/T 29190-2012 Measurement methods of drift rate of scanning probe microscope
Abstract
This standard specifies the terms and definitions, abbreviations, measurement steps, performance parameter specifications, and basic methods for measuring the drift rate based on SPM scanning images.
This standard is applicable to drift rate measurements ranging from 0.01 nm/s to 10 nm/s. The drift measurements in this standard are not applicable to image correction.
General Product Information
| Document Type | National standards |
|---|---|
| Standard Status | Active |
| Standard Code | GB/T 29190-2012 |
| CCS | Optical metrology |
| ICS | Other standards related to optics and optical measurement |
| Implement Date | 2013-06-01 |
Price
$ 66
Subtotal
$ 66
Tax
$ 0.00
Order Total (incl. tax)
$ 66