GB/T 15616-1995
Replaced
GB/T 29190-2012
Active
National standards
GB/T 29190-2012 Measurement methods of drift rate of scanning probe microscope
GB/T 29190-2012 Measurement methods of drift rate of scanning probe microscope
Basic Information
Standard Code:
GB/T 29190-2012
Standard Type:
National standards
Standard Status:
Active
is_force_gb:
no
CCS Name:
Optical metrology
ICS Name:
Other standards related to optics and optical measurement
Publish Date:
2012-12-31
Implement Date:
2013-06-01
Pages:
19 pages
Scope
This standard specifies the terms and definitions, abbreviations, measurement steps, performance parameter specifications, and basic methods for measuring the drift rate based on SPM scanning images.
This standard is applicable to drift rate measurements ranging from 0.01 nm/s to 10 nm/s. The drift measurements in this standard are not applicable to image correction.
Development Information
Referenced Standards
ISO 18115
GB/T 15000.3-1994 Directives for the work of reference materials(3) General principles and statistic methods for certification of reference materials
GB/T 15000.3-2008 Directives for the work of reference materials(3)—Reference materials—General and statistical principles for certification
GB/T 15000.3-2023 Directives for the work of reference materials—Part 3:Reference materials—Characterization and assessment of homogeneity and stability
JJF 1001-1998 General Terms in Metrology and Their Definitions
JJF 1001-2011 General Terms in Metrology and Their Definitions
JJF 1059.1-2012 Evaluation and Expression of Uncertainty in Measurement
JJF 1059.2-2012 Monte Carlo Method for Evaluation of Measurement Uncertainty
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