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DB31/ 792-2020 Active
DB31/ 792-2020 The energy consumption limit for single crystal silicon and its wafers as products
Abstract
This standard specifies the technical requirements, statistical scope, calculation methods, and guidance for energy conservation and reduction for silicon single crystals and silicon single crystal wafers.
This standard applies to semiconductor-grade silicon single crystals and silicon single crystal wafers, including grinding wafers, polished wafers, and epitaxial wafers (hereinafter collectively referred to as "silicon wafers"). It is applicable to the calculation and assessment of the single energy consumption of products of silicon wafer manufacturers, as well as the control of the single energy consumption of new projects.
General Product Information
| Document Type | Shanghai CityLocal standards |
|---|---|
| Standard Status | Active |
| Standard Code | DB31/ 792-2020 |
| CCS | Technical management |
| ICS | Integrated Energy and Heat Transfer Engineering |
| Implement Date | 2020-06-01 |
Price
$ 32
Subtotal
$ 32
Tax
$ 0.00
Order Total (incl. tax)
$ 32