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GB/T 37049-2018 Active
GB/T 37049-2018 Test method for the content of metal impurity in electronic grade polysilicon—Inductively coupled-plasma mass spectrometry method
Abstract
This standard specifies the method for determining the content of trace base metal impurities in electronic-grade polysilicon using inductively coupled plasma mass spectrometers (ICP-MS).
This standard is applicable to the determination of iron, chromium, nickel, copper, zinc, and sodium in a base metal impurity range of less than 5 ng/g in GB/T 12963.
General Product Information
| Document Type | National standards |
|---|---|
| Standard Status | Active |
| Standard Code | GB/T 37049-2018 |
| CCS | Analysis methods for semi-metallic and semiconductor materials |
| ICS | Chemical analysis of metal materials |
| Implement Date | 2019-04-01 |
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