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GB/T 14142-1993
GB/T 14142-1993 Test method for crystallographic perfection of epitaxial layers in silicon by etching techniques
General Product Information
| Document Type | National standards |
|---|---|
| Standard Status | Replaced |
| Standard Code | GB/T 14142-1993 |
| CCS | Non-destructive testing methods for metals |
| ICS | Semiconductor materials |
| Implement Date | 1993-10-01 |
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