GB/T 27760-2011 Active
GB/T 27760-2011 Test method for calibrating the z-magnification of an atomic force microscope at subnanometer displacement levels using Si(111) monatomic steps
Abstract
This standard specifies the measurement method for calibrating the z-axis scale of an atomic force microscope using samples with atomic step heights on the (111) crystal plane of Si.
This standard is applicable to atomic force microscopes operating in atmospheric or vacuum environments, and its z-axis magnification reaches the maximum level, that is, the z-axis displacement is in the nanometer and sub-nanometer range, which is a detection range commonly used by atomic force microscopes to detect the surfaces of semiconductors, optical devices, and other high-tech components.
This standard does not address all possible safety issues. Before applying this standard, it is the user's responsibility to take appropriate safety and health measures and ensure compliance with the conditions stipulated by relevant national regulations.
General Product Information
| Document Type | National standards |
|---|---|
| Standard Status | Active |
| Standard Code | GB/T 27760-2011 |
| CCS | Basic standards and general methods |
| ICS | The experimental conditions and procedures are summarized here |
| Implement Date | 2012-05-01 |